Radio frequency magnetron sputtering growth and characterization of indium-tin oxide (ITO) thin films for NO2 gas sensors

✍ Scribed by G. Sberveglieri; S. Groppelli; G. Coccoli

• Publisher: Elsevier Science
• Year: 1988
• Weight: 806 KB
• Volume: 15
• Category: Article
• ISSN: 0250-6874
• DOI: 10.1016/0250-6874(88)87013-6