Characterization of Indium-Tin-Oxide Thin Film Microelectrodes for Biomedical Use

✍ Scribed by A. Jakubec; V. Tvarozek; I. Novotny; V. Rehacek; V. Breternitz; Ch. Knedlik; L. Spiess

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 557 KB
• Volume: 34
• Category: Article
• ISSN: 0933-5137
• DOI: 10.1002/mawe.200390132

✦ Synopsis

Abstract

Selected properties of indium‐tin‐oxide (ITO) films prepared by r.f. diode sputtering have been investigated in consideration of surface morphology, optical properties, crystal structure and phase formation, electrical resistivity and chemical resistance. The ITO films showed low electrical resistivity (6·10^‐5^ Ωm), high optical transmittance (> 80 %) and suitable chemical resistance against selected chemicals during 1 hour.