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Tosoh offers indium tin oxide materials for transparent thin film applications

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 125 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91845-f

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## Abstract Selected properties of indium‐tin‐oxide (ITO) films prepared by r.f. diode sputtering have been investigated in consideration of surface morphology, optical properties, crystal structure and phase formation, electrical resistivity and chemical resistance. The ITO films showed low electr