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Characterization of isochronally and isothermally annealed indium tin oxide thin films

✍ Scribed by F.M. Amanullah; K.J. Pratap; V. Hari Babu


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
452 KB
Volume
254
Category
Article
ISSN
0040-6090

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## Abstract Selected properties of indium‐tin‐oxide (ITO) films prepared by r.f. diode sputtering have been investigated in consideration of surface morphology, optical properties, crystal structure and phase formation, electrical resistivity and chemical resistance. The ITO films showed low electr