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Characterization of the density, structure and chemical states of carbon nitride films

โœ Scribed by Wentao Xu; Toshiyuki Fujimoto; Boquan Li; Isao Kojima


Book ID
108417406
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
98 KB
Volume
175-176
Category
Article
ISSN
0169-4332

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