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Characterization of amorphous carbon nitride by bottom-gated thin-film structure

✍ Scribed by Hayashi, Yasuhiko; Kamada, N.; Soga, T.; Jimbo, T.


Book ID
123536545
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
196 KB
Volume
15
Category
Article
ISSN
0925-9635

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