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Characterization of sputtered BZT thin films for MCM: Multichip module

✍ Scribed by Nobuo Kamehara; Mineharu Tsukada; Jeffrey S. Cross; Kazuaki Kurihara


Publisher
American Institute of Chemical Engineers
Year
1997
Tongue
English
Weight
514 KB
Volume
43
Category
Article
ISSN
0001-1541

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