Zero-defect sputter deposition metallization method for high volume manufacturing of grafted multilayer thin film modules : Tom Swirbel. IEEE Transactions on Components, Hybrids and Manufacturing Technology, 16(1), 1 (February 1993)

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 111 KB
• Volume: 34
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(94)90428-6