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Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy

✍ Scribed by G. Kragler; H. Bender; G. Willeke; E. Bucher; J. Vanhellemont

Publisher
Springer
Year
1994
Tongue
English
Weight
495 KB
Volume
58
Category
Article
ISSN
1432-0630

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