๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

2486. Evaluation of surface roughness of metal films by transmission electron microscopy and ellipsometry

Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
134 KB
Volume
27
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Characterisation of rough silicon surfac
Characterisation of rough silicon surfaces using spectroscopic ellipsometry, reflectance, scanning electron microscopy and scattering measurements
โœ C. Pickering; R. Greef; A.M. Hodge ๐Ÿ“‚ Article ๐Ÿ“… 1990 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 423 KB

A critical comparison of several techniques for the evaluation of imperfections in sificon-onsapphire (SOS) wafers leads to the adoption of a model of the SOS surface based on an effective medium approximation treatment of the ellipsometric" results.