✦ LIBER ✦

Characterization of semiconductor nanostructures formed by using ultrathin Si oxide technology

✍ Scribed by M. Ichikawa; S. Uchida; A.A. Shklyaev; Y. Nakamura; S.-P. Cho; N. Tanaka

Book ID: 103819561
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 663 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.07.046

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Growth of Si and Ge nanostructures on Si

Growth of Si and Ge nanostructures on Si substrates using ultrathin SiO2 technology

✍ Ichikawa, M. 📂 Article 📅 2002 🏛 IEEE 🌐 English ⚖ 356 KB

Acoustic spectroscopy and electrical cha

Acoustic spectroscopy and electrical characterization of SiO2/Si structures with ultrathin SiO2 layers formed by nitric acid oxidation

✍ Bury, Peter ;Kobayashi, Hikaru ;Takahashi, Masao ;Imamura, Kentaro ;Sidor, Peter 📂 Article 📅 2009 🏛 Walter de Gruyter GmbH 🌐 English ⚖ 752 KB

Properties of Al2O3: nc-Si nanostructure

Properties of Al2O3: nc-Si nanostructures formed by implantation of silicon ions into sapphire and amorphous films of aluminum oxide

✍ D. I. Tetelbaum; A. N. Mikhaylov; A. I. Belov; A. V. Ershov; E. A. Pitirimova; S 📂 Article 📅 2009 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 368 KB

Structural and optical characterization

Structural and optical characterization of GaN nanostructures formed by using N+implantation into GaAs at various temperature

✍ Hyung-Joo Woo; Gi-Dong Kim; Han-Woo Choi; Joon-Kon Kim 📂 Article 📅 2012 🏛 The Korean Physical Society 🌐 English ⚖ 317 KB

Effect of N2-annealing on n-type Si meta

Effect of N2-annealing on n-type Si metal-oxide-semiconductor capacitors by using liquid-phase deposition SiO2

✍ Gwo-Huei Yang; Wen-Tse Chang; Jun-Dar Hwang; Jun-Hung Lin; Yu-Hung Chen 📂 Article 📅 2011 🏛 The Institution of Engineering and Technology 🌐 English ⚖ 212 KB

Characterization of thin films and mater

Characterization of thin films and materials used in semiconductor technology by spectroscopic ellipsometry

✍ F. Ferrieu; J.H. Lecat 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 418 KB