Acoustic spectroscopy and electrical characterization of SiO2/Si structures with ultrathin SiO2 layers formed by nitric acid oxidation

✍ Scribed by Bury, Peter ;Kobayashi, Hikaru ;Takahashi, Masao ;Imamura, Kentaro ;Sidor, Peter ;ÄŒernobila, FrantiÅ¡ek

• Book ID: 111489082
• Publisher: Walter de Gruyter GmbH
• Year: 2009
• Tongue: English
• Weight: 752 KB
• Volume: 7
• Category: Article
• ISSN: 2391-5471
• DOI: 10.2478/s11534-009-0029-5