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Characterization of plasma-deposited silicon nitride coating used for integrated circuit encapsulation

✍ Scribed by Vineet S. Dharmadhikari

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 551 KB
Volume: 153
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90205-7

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