✦ LIBER ✦
Plasma enhanced deposition of “silicon nitride” for use as an encapsulant for silicon ion-implanted gallium arsenide : D. C. Bartle, D. C. Andrews, J. D. Grange, P. G. Harris, A. D. Trigg and D. K. Wickenden. Vacuum34 (1–2), 315 (1984)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 136 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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