Characterization of plasma-deposited silicon nitride coating used for integrated circuit encapsulation: Vineet S Dharmadhikari, Thin Solid Films, 153, 1987, 459–468

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 146 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90395-3