Characterization of microstructure in ion-implanted garnet by transmission electron microscopy
β Scribed by Yoshiie, T.; Bauer, C.; Kryder, M.
- Book ID
- 114646772
- Publisher
- IEEE
- Year
- 1983
- Tongue
- English
- Weight
- 913 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0018-9464
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π SIMILAR VOLUMES
Separation by implanted oxygen (SIMOX) substrates from several research production processes including low energy implantation, multiple implantation and low dose studies were characterized using spectroscopic ellipsometry, crosssectional transmission electron microscopy (XTEM) and planar view TEM.
Aluminium nitride samples sintered with various Y20: concentrations are characterized by transmission electron microscopy. Topology and second phase characteristics at grain boundaries are investigated by X-ray and diffraction experiments. At low Y:O~ concentrations (up to 10%) second phases (mainly