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Characterization of metal impurities in silicon-on-insulator material

✍ Scribed by L. Frey; F. Kroninger; N. Streckfusse; H. Ryssel; J. Margail

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 297 KB
Volume: 12
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(92)90285-h

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