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Origins of metal impurities in single-crystal Czochralski silicon

✍ Scribed by K. Harada; H. Tanaka; J. Matsubara; Y. Shimanuki; H. Furuya

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 487 KB
Volume: 154
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(95)80028-x

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