Multiple Czochralski growth of silicon crystals from a single crucible
β Scribed by R.L. Lane; A.H. Kachare
- Publisher
- Elsevier Science
- Year
- 1980
- Tongue
- English
- Weight
- 786 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0022-0248
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract In order to understand the influence of crucible geometry combined with natural convection and Marangoni convection on melt flow pattern, temperature and pressure fields in silicon Czochralski crystal growth process, a set of numerical simulations was conducted. We carry out calculation
## Abstract The effects of several growth parameters in cylindrical and spherical Czochralski crystal process are studied numerically and particularly, we focus on the influence of the pressure field. We present a set of threeβdimensional computational simulations using the finite volume package Fl