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Combined effects of crucible geometry and Marangoni convection on silicon Czochralski crystal growth

✍ Scribed by F. Mokhtari; A. Bouabdallah; M. Zizi; S. Hanchi; A. Alemany

Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
944 KB
Volume
44
Category
Article
ISSN
0232-1300

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✦ Synopsis

Abstract

In order to understand the influence of crucible geometry combined with natural convection and Marangoni convection on melt flow pattern, temperature and pressure fields in silicon Czochralski crystal growth process, a set of numerical simulations was conducted. We carry out calculation enable us to determine temperature, pressure and velocity fields in function of Grashof and Marangoni numbers. The essential results show that the hemispherical geometry of crucible seems to be adapted for the growth of a good quality crystal and the pressure field is strongly affected by natural and Marangoni convection and it is more sensitive than temperature. (Β© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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