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Characterization of magnetron sputtered carbon nitride films

✍ Scribed by Kulisch, W; Delplancke-Ogletree, M.P; Buliř, J; Jelı́nek, M; Jurek, K; Zemek, J; Klimovič, J


Book ID
123377075
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
188 KB
Volume
8
Category
Article
ISSN
0925-9635

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