The existence of with hardness characteristics similar or better than diamond was predicted in 1990 by Liu b-C 3 N 4 and Cohen. Many studies have since been devoted to the synthesis of this compound. In the present work, carbon nitride รlms were deposited by various reactive magnetron sputtering pro
Magnetron sputtered carbon nitride films
โ Scribed by P.V. Kola; D.C. Cameron; M.S.J. Hashmi
- Book ID
- 107930398
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 325 KB
- Volume
- 68-69
- Category
- Article
- ISSN
- 0257-8972
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The existence of with hardness characteristics similar or better than diamond was predicted in 1990 by Liu b-C 3 N 4 and Cohen. Many studies have since been devoted to the synthesis of this compound. In the present work, carbon nitride รlms were deposited by various reactive magnetron sputtering pro
Thin films of CN x were deposited by reactive r.f.-magnetron sputtering on Si(100) substrates. The effect of annealing temperatures on the structural properties of the films has been studied by Fourier transform infrared (FTIR) spectroscopy, x-ray photoelectron spectroscopy (XPS) and transmission el