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Magnetron-sputtered carbon nitride (CNx) films

✍ Scribed by P.V. Kola; D.C. Cameron; B.J. Meenan; K.A. Pischow; C.A. Anderson; N.M.D. Brown; M.S.J. Hashmi

Book ID: 107930552
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 869 KB
Volume: 74-75
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)08336-7

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