Characterization of magnetron-sputtered ε iron-nitride films
✍ Scribed by Matthias Niederdrenk; Peter Schaaf; Klaus-Peter Lieb; Olaf Schulte
- Book ID
- 116160973
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 696 KB
- Volume
- 237
- Category
- Article
- ISSN
- 0925-8388
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The existence of with hardness characteristics similar or better than diamond was predicted in 1990 by Liu b-C 3 N 4 and Cohen. Many studies have since been devoted to the synthesis of this compound. In the present work, carbon nitride Ðlms were deposited by various reactive magnetron sputtering pro
The existence of with hardness characteristics similar or better than diamond was predicted in 1990 by Liu b-C 3 N 4 and Cohen. Many studies have since been devoted to the synthesis of this compound. In the present work, carbon nitride Ðlms were deposited by various reactive magnetron sputtering pro