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Application-relevant characterization of magnetron-sputtered carbon nitride films

✍ Scribed by Jelı́nek, M.; Kulisch, W.; Delplancke-Ogletree, M.P.; Vorlı́ček, V.; Studnička, V.; Chvostová, D.; Trchová, M.; Sobota, J.

Book ID
122590925
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
219 KB
Volume
8
Category
Article
ISSN
0925-9635

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