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Characterization of dielectric columnar thin films by variable angle Mueller matrix and spectroscopic ellipsometry

✍ Scribed by J. Gospodyn; J.C. Sit

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 424 KB
Volume: 29
Category: Article
ISSN: 0925-3467
DOI: 10.1016/j.optmat.2005.10.004

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