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Characterization of 4H-SiC (0001) surface processed by plasma-assisted polishing

✍ Scribed by Hui Deng, Masaki Ueda, Kazuya Yamamura

Book ID: 120742403
Publisher: Springer
Year: 2012
Tongue: English
Weight: 991 KB
Volume: 72
Category: Article
ISSN: 0268-3768
DOI: 10.1007/s00170-012-4430-7

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