✦ LIBER ✦
Preparation of ultrasmooth and defect-free 4H-SiC(0001) surfaces by elastic emission machining
✍ Scribed by Akihisa Kubota; Hidekazu Mimura; Kouji Inagaki; Kenta Arima; Yuzo Mori; Kazuto Yamauchi
- Book ID
- 107453416
- Publisher
- Springer US
- Year
- 2005
- Tongue
- English
- Weight
- 362 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0361-5235
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