Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface

✍ Scribed by K. Yamamura; T. Takiguchi; M. Ueda; H. Deng; A.N. Hattori; N. Zettsu

• Book ID: 108095042
• Publisher: International Academy for Production Engineering
• Year: 2011
• Tongue: English
• Weight: 453 KB
• Volume: 60
• Category: Article
• ISSN: 0007-8506
• DOI: 10.1016/j.cirp.2011.03.072