✦ LIBER ✦
Damage-free and Atomically-flat Finishing of Single Crystal SiC by Combination of Oxidation and Soft Abrasive Polishing
✍ Scribed by Deng, Hui; Endo, Katsuyoshi; Yamamura, Kazuya
- Book ID
- 124104677
- Publisher
- Elsevier
- Year
- 2014
- Tongue
- English
- Weight
- 896 KB
- Volume
- 13
- Category
- Article
- ISSN
- 2212-8271
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