✦ LIBER ✦
Optimization of the plasma oxidation and abrasive polishing processes in plasma-assisted polishing for highly effective planarization of 4H-SiC
✍ Scribed by Deng, H.; Monna, K.; Tabata, T.; Endo, K.; Yamamura, K.
- Book ID
- 122188215
- Publisher
- International Academy for Production Engineering
- Year
- 2014
- Tongue
- English
- Weight
- 934 KB
- Volume
- 63
- Category
- Article
- ISSN
- 0007-8506
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