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Characterization of 3C-SiC thin films grown on Si surfaces patterned with various periods and depths

✍ Scribed by S. -Y. Hwang; J. -H. Park; H. J. Song; S. J. Jang; Su Hwan Oh; Moon Ho Park; J. -H. Kim; B. -T. Lee

No coin nor oath required. For personal study only.

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