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Growth and characterization of highly c-axis textured SrTiO3 thin films directly grown on Si(001) substrates by ion beam sputter deposition

โœ Scribed by G. Panomsuwan; S.-P. Cho; N. Saito; O. Takai


Book ID
112069596
Publisher
John Wiley and Sons
Year
2012
Tongue
English
Weight
417 KB
Volume
47
Category
Article
ISSN
0232-1300

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Thin BaTiO 3 films were deposited on thin TiN film covered Si wafers by ion beam assisted deposition comprising of two electron beam evaporators for evaporating Ti and BaCO 3 and an electron cyclotron resonance ion source for ionizing O 2 . Films deposited using 25 eV oxygen ion beams had many small