✦ LIBER ✦
Preparation and characterization of highlyc-axis textured MgO buffer layer grown on Si(100) substrate by RF magnetron sputtering for use as growth template of ferroelectric thin film
✍ Scribed by Wen-Ching Shih; Tzyy-Long Wang; Ming-Han Chiang; Mu-Shiang Wu
- Publisher
- Springer US
- Year
- 2010
- Tongue
- English
- Weight
- 361 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0957-4522
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