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Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics

✍ Scribed by J. Gautier; F. Delmotte; F. Bridou; M.F. Ravet; F. Varniere; M. Roulliay; A. Jerome; I. Vickridge

No coin nor oath required. For personal study only.

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