✦ LIBER ✦
Experimental test chamber design for optics exposure testing and debris characterization of a xenon discharge produced plasma source for extreme ultraviolet lithography
✍ Scribed by Keith C. Thompson; Erik L. Antonsen; Matthew R. Hendricks; Brian E. Jurczyk; M. Williams; D.N. Ruzic
- Book ID
- 108207544
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 576 KB
- Volume
- 83
- Category
- Article
- ISSN
- 0167-9317
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