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Characterization and growth of SiC epilayers on Si substrates

✍ Scribed by B.C. Johnson; J.M. Meese; G.W. Zajac; J.O. Schreiner; J.A. Kaduk; T.H. Fleisch

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 929 KB
Volume: 2
Category: Article
ISSN: 0749-6036
DOI: 10.1016/0749-6036(86)90024-8

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