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Characterization and depth profiles measurements of silicon nitride thin films on silicon and molybdenum substrates by Auger electron spectroscopy

✍ Scribed by Chakib Fakih; Glades Bachir Fakih; Ali Kaafarani; M. Zoaeter; René Sylvain Bes; René Berjoan


Book ID
116374360
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
124 KB
Volume
33
Category
Article
ISSN
0927-0256

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