X-ray double crystal and X-ray topographic characterization of silicon carbide thin films on silicon, titanium carbide, 6H-silicon carbide, and aluminum nitride/sapphire substrates

✍ Scribed by J. Chaudhuri; R. Thokala; J.H. Edgar; B.S. Sywe

• Book ID: 107864805
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 1000 KB
• Volume: 274
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(95)07087-7