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Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition

✍ Scribed by Park, Sang-Hee Ko; Hwang, Chi-Sun; Kwack, Ho-Sang; Lee, Jin-Hong; Chu, Hye Yong

Book ID: 127240645
Publisher: The Electrochemical Society
Year: 2006
Tongue: English
Weight: 251 KB
Volume: 9
Category: Article
ISSN: 1099-0062
DOI: 10.1149/1.2221770

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