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Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications

✍ Scribed by Sultan, S.M.; Clark, O.D.; Masaud, T.B.; Fang, Q.; Gunn, R.; Hakim, M.M.A.; Sun, K.; Ashburn, P.; Chong, H.M.H.

Book ID: 121985886
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 480 KB
Volume: 97
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2012.04.019

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