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Controlling preferred orientation of ZnO thin films by atomic layer deposition

✍ Scribed by Sang-Hee Ko Park; Yong Eui Lee

Book ID: 111590158
Publisher: Springer
Year: 2004
Tongue: English
Weight: 135 KB
Volume: 39
Category: Article
ISSN: 0022-2461
DOI: 10.1023/b:jmsc.0000017786.81842.ae

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