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Preferential growth of ZnO thin films by the atomic layer deposition technique

✍ Scribed by Pung, Swee-Yong; Choy, Kwang-Leong; Hou, Xianghui; Shan, Chongxin

Book ID: 126942261
Publisher: Institute of Physics
Year: 2008
Tongue: English
Weight: 598 KB
Volume: 19
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/19/43/435609

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