𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Characteristics of metal-oxide-semiconductor (MOS) device with Er metal gate on SiO2 film

✍ Scribed by Chel-Jong Choi; Ha-Yong Yang; Hyo-Bong Hong; Jin-Gyu Kim; Sung-Yong Chang; Jouhahn Lee


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
358 KB
Volume
49
Category
Article
ISSN
0026-2714

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Effect of thin Si insertion at metal gat
✍ D. Kitayama; T. Koyanagi; K. Kakushima; P. Ahmet; K. Tsutsui; A. Nishiyama; N. S πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 464 KB

The effect of a thin Si layer insertion at W/La 2 O 3 interface on the electrical characteristics of MOS capacitors and transistors is investigated. A suppression in the EOT increase can be obtained with Si insertion, indicating the inhibition of diffusion of oxygen atoms into La 2 O 3 layer by form

Analysis of interface trap density of me
✍ Sanghun Jeon; Sungho Park πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 437 KB

In this study, the interface trap density of metal-oxide-semiconductor (MOS) devices with Pr 2 O 3 gate dielectric deposited on Si is determined by using a conductance method. In order to determine the exact value of the interface trap density, the series resistance is estimated directly from the im