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Characterisation of TiN films prepared by electron shower, arc ion-plating and sputtering methods

โœ Scribed by H. Yumoto; K. Kaneko; M. Ishihara; K. Akasi; T. Kaneko


Book ID
111997986
Publisher
John Wiley and Sons
Year
1995
Tongue
English
Weight
748 KB
Volume
5
Category
Article
ISSN
1616-301X

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