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Deposition and characterisation of a-Si: H films prepared by reactive ion beam sputtering

✍ Scribed by Mohan Krishan Bhan; Subhash C. Kashyap; L.K. Malhotra

Book ID: 115986456
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 389 KB
Volume: 101
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(88)90375-4

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