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WNx films prepared by reactive ion-beam sputter deposition

โœ Scribed by A. Bosseboeuf; A. Fourrier; F. Meyer; A. Benhocine; G. Gautherin


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
449 KB
Volume
53
Category
Article
ISSN
0169-4332

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