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Characterisation of porous silicon layers by spectroscopic ellipsometry

✍ Scribed by U. Rossow; H. Münder; M. Thönissen; W. Theiβ

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 404 KB
Volume: 57
Category: Article
ISSN: 0022-2313
DOI: 10.1016/0022-2313(93)90134-9

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