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Characterization of Deposited Nanocrystalline Silicon by Spectroscopic Ellipsometry

✍ Scribed by Bertin, F. ;Baron, Th. ;Mariolle, D. ;Martin, F. ;Chabli, A. ;Dupuy, M.

Publisher
John Wiley and Sons
Year
1999
Tongue
English
Weight
359 KB
Volume
175
Category
Article
ISSN
0031-8965

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