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Characterisation of laser ablated silicon oxynitride thin films

✍ Scribed by Rodica Radoi; Cristina Gherasim; Maria Dinescu

Book ID: 117625271
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 169 KB
Volume: 286
Category: Article
ISSN: 0925-8388
DOI: 10.1016/s0925-8388(98)01026-3

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